Semiconductor device and method for manufacturing semiconductor device
AssigneeSeiko Epson Corporation
InventorsTakayuki SAIKI, Shinya SATO, Hiroyuki TAKAMIYA
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AssigneeSeiko Epson Corporation
InventorsTakayuki SAIKI, Shinya SATO, Hiroyuki TAKAMIYA
Estimating the term…
A semiconductor device includes: a plurality of semiconductor substrates that are layered; a through electrode penetrating through a predetermined semiconductor substrate of the semiconductor substrates and electrically connected with an external terminal of the semiconductor device; a circuit element provided on the predetermined semiconductor substrate; and an electrostatic discharge protection circuit also provided on the predetermined semiconductor substrate. In the device, wiring resistance between the electrostatic discharge protection circuit and the through electrode is smaller than wiring resistance between the circuit element and the through electrode.
A semiconductor device, comprising:
A semiconductor device, comprising:
A method for manufacturing a semiconductor device,
Dependencies are inferred from the claim text.