Production of a self-aligned cusin barrier
AssigneeSTMicroelectronics S.r.l.
InventorsPierre Caubet, Nicolas Casanova
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AssigneeSTMicroelectronics S.r.l.
InventorsPierre Caubet, Nicolas Casanova
Estimating the term…
A semiconductor product includes a portion made of copper, a portion made of a dielectric and a self-aligned barrier between the copper portion and the dielectric portion. The self-aligned barrier includes a first copper silicide layer comprising predominantly first copper silicide molecules, and a second copper silicide layer comprising predominantly second copper silicide molecules. The proportion of the number of silicon atoms is higher in the second silicide molecules than in the first silicide molecules. The second copper silicide layer is positioned between the copper portion and the first copper silicide layer. A nitride layer may overlie at least part of the first copper silicide layer.
A semiconductor product, comprising:
An imager, comprising:
A semiconductor product including a coil with lines formed of a copper portion and a self-aligned barrier over the copper portion comprising:
An integrated circuit, comprising:
The integrated circuit of claim 19, wherein a proportion of a number of silicon atoms in the second copper silicide molecules is higher than a proportion of a number of silicon atoms in the first copper silicide molecules.
Apparatus, comprising:
Apparatus, comprising:
Dependencies are inferred from the claim text.