Solid-state imaging device, method of producing the same, and camera

A method of producing a solid-state imaging device comprising the steps of:

• forming on a substrate a photoelectric conversion portion that receives light on a light-receiving surface and that photoelectrically converts the light received on the light-receiving surface to generate a signal charge;
• forming above the light-receiving surface an optical waveguide that guides light to the light-receiving surface;
• and
• forming above the optical waveguide a color filter which colors light and from which colored light is emitted to the optical waveguide,
• wherein, in the step of forming the color filter, the color filter is formed from a photosensitive resin film containing a dye by performing an exposure process on the photosensitive resin film and then performing a development process on the photosensitive resin film, and
• in the step of forming the optical waveguide, a surface treatment for forming irregularities on a surface of a core portion of the optical waveguide is performed so that exposure light radiated onto the photosensitive resin film when the exposure process is performed in the step of forming the color filter is scattered at a surface facing the color filter at the core portion.

A solid-state imaging device comprising:

• a photoelectric conversion portion that receives light on a light-receiving surface and that photoelectrically converts the light received on the light-receiving surface to generate a signal charge;
• an optical waveguide that guides light to the light-receiving surface;
• and
• a color filter which colors light and from which colored light is emitted to the optical waveguide,
• wherein the color filter is formed by performing an exposure process on a photosensitive resin film containing a dye and then performing a development process on the photosensitive resin film, and
• the optical waveguide includes a core portion composed of a material that absorbs exposure light radiated onto the photosensitive resin film when the exposure process is performed in the formation of the color filter.

A solid-state imaging device comprising:

• a photoelectric conversion portion that receives light on a light-receiving surface and that photoelectrically converts the light received on the light-receiving surface to generate a signal charge;
• an optical waveguide that guides light to the light-receiving surface;
• and
• a color filter which colors light and from which colored light is emitted to the optical waveguide, wherein the color filter is formed by performing an exposure process on a photosensitive resin film containing a dye and then performing a development process on the photosensitive resin film, and
• irregularities are provided on a surface of a core portion of the optical waveguide so that exposure light radiated onto the photosensitive resin film when the exposure process is performed in the formation of the color filter is scattered at a surface facing the color filter at the core portion.

A camera comprising:

• a photoelectric conversion portion that receives light on a light-receiving surface and that photoelectrically converts the light received on the light-receiving surface to generate a signal charge;
• an optical waveguide that guides light to the light-receiving surface;
• and
• a color filter which colors light and from which colored light is emitted to the optical waveguide,
• wherein the color filter is formed by performing an exposure process on a photosensitive resin film containing a dye and then performing a development process on the photosensitive resin film, and
• the optical waveguide includes a core portion composed of a material that absorbs exposure light radiated onto the photosensitive resin film when the exposure process is performed in the formation of the color filter.

A camera comprising:

• a photoelectric conversion portion that receives light on a light-receiving surface and that photoelectrically converts the light received on the light-receiving surface to generate a signal charge;
• an optical waveguide that guides light to the light-receiving surface;
• and
• a color filter which colors light and from which colored light is emitted to the optical waveguide,
• wherein the color filter is formed by performing an exposure process on a photosensitive resin film containing a dye and then performing a development process on the photosensitive resin film, and
• irregularities are provided on a surface of a core portion of the optical waveguide so that exposure light radiated onto the photosensitive resin film when the exposure process is performed in the formation of the color filter is scattered at a surface facing the color filter at the core portion.