Device Built By Joining A Plurality Of Layers
AssigneeNederlandse Organisatie Voor Toegepast- natuurwetenschappeliijk Onderzoek TNO
InventorsErik Peter Veninga, Marinus Marc Koetse
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AssigneeNederlandse Organisatie Voor Toegepast- natuurwetenschappeliijk Onderzoek TNO
InventorsErik Peter Veninga, Marinus Marc Koetse
Estimating the term…
In a method of manufacturing a multilayer device exposed surfaces of a first and second layer are joined together. Before joining a depression is created in the exposed surface of a layer and raw material, such as electrically conductive material, for forming an electric circuit is deposited in the depression, typically filling the depression. Excess material is mechanically removed before the layers are joined. In this way conductor tracks may be created between layers. When adjacent fluid chambers are provided, separated by one of the layers, the depression with the material in it makes it possible realize a sensor device with a reduced separation between the chambers.
A method of manufacturing a multilayer device, the method comprising:
A multilayer device comprising a stack of joined layers, the stack of joined layers comprising a layer wherein electrically active material is present that has been deposited onto the layer in a depression of the layer that faces another layer of the stack layers.
Dependencies are inferred from the claim text.