System for testing semiconductors
AssigneeCascade Microtech, Inc.
InventorsPeter Andrews, David Hess
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Abstract
A system that includes an imaging device for effectively positioning a probe for testing a semiconductor wafer.
Claims10
A probing system for a device under test comprising:
- (a) an objective lens sensing said device under test through a single optical path;
- (b) a first imaging device sensing a first video sequence of said device under test at a first magnification from said single optical path;
- (c) a second imaging device sensing a second video sequence of said device under test at a second magnification from said single optical path;
- (d) a third imaging device sensing a third video sequence of said device under test at a third magnification from said single optical path;
- (e) providing a video signal to a display that simultaneously presents said first video signal, said second video signal, and said third video signal to a monitor.
A probing system for a device under test comprising:
- (a) an objective lens sensing said device under test through a single optical path;
- (b) a first imaging device sensing a first video sequence of said device under test at a first magnification from said single optical path;
- (c) a second imaging device sensing a second video sequence of said device under test at a second magnification from said single optical path;
- (d) simultaneously providing said first video sequence, and said second video sequence, to a display;
- (e) wherein the magnification of said first video signal is selectable and the magnification of said second video signal is selectable.
A probing system for a device under test comprising:
- (a) an objective lens sensing said device under test through a single optical path;
- (b) an imaging device sensing a video sequence of said device under test at a first magnification from said single optical path;
- (c) a display displaying the video sequence in a first window;
- said display displaying a region of said first video sequence in a second window.
A method for displaying video for a probing system comprising:
- (a) receiving a video signal of a device under test;
- (b) presenting said video signal in a first window on a display;
- (c) presenting a first portion of said video signal in a second window on a portion of said display;
- (d) presenting a second portion of said video signal in a third window on a portion of said display;
- (e) wherein the first portion and said second portion are selectable by an operator.
The method of claim 8 further comprising a third portion of said video signal presented in a fourth window, a fourth portion of said video signal presented in a fifth window, a fifth portion of said video signal presented in a sixth window, a fifth portion of said video signal presented in a sixth window, and a sixth portion of said video signal presented in a seventh window.
Dependencies are inferred from the claim text.