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US 2010/0077516 A1Published application
Platinum silicide tip apices for probe-based technologies
AssigneeInternational Business Machines Corporation
InventorsHarish Bhaskaran, Michel Despont, Ute Drechsler, Abu Sebastian
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Abstract
Tips including a platinum silicide at an apex of a single crystal silicon tip are provided herein. Also, techniques for creating a tip are provided. The techniques include depositing an amount of platinum (Pt) on a single crystal silicon tip, annealing the platinum and single crystal silicon tip to form a platinum silicide, and selectively etching the platinum with respect to the formed platinum silicide.
Claims18
A tip, wherein the tip comprises a platinum silicide at an apex of a single crystal silicon tip.
A method for creating a tip, comprising the steps of:
- depositing an amount of platinum (Pt) on a single crystal silicon tip;
- annealing the platinum and single crystal silicon tip to form a platinum silicide;
- and
- selectively etching the platinum with respect to the formed platinum silicide.
1 more element
Dependencies are inferred from the claim text.