Self-diagnostic semiconductor equipment

A computer readable medium having instructions stored thereon that, when executed by a processor, cause the processor to perform a method for predictive maintenance of semiconductor process equipment, comprising:

• performing at least one self-diagnostic test on the semiconductor processing equipment with no substrate present in the equipment, the self-diagnostic test comprising:
• measuring one or more predictor parameters and one or more response parameters from the semiconductor process equipment;
• calculating one or more expected response parameters based upon the measured predictor parameters utilizing a predictive model;
• comparing the one or more measured response parameters with the one or more expected response parameters;
• determining whether equipment maintenance is required based upon the comparison.

A system for processing semiconductor substrates, comprising:

• a process chamber;
• and
• a controller coupled to the process chamber and configured to control the operation thereof, wherein the controller comprises computer readable medium having instructions stored thereon that, when executed by the controller, cause the controller to perform a method for predictive maintenance of the process chamber, comprising:
• performing at least one self-diagnostic test on the semiconductor processing equipment with no substrate present in the equipment, the self-diagnostic test comprising:
• measuring one or more predictor parameters and one or more response parameters from the semiconductor process equipment;
• calculating one or more expected response parameters based upon the measured predictor parameters utilizing a predictive model;
• comparing the one or more measured response parameters with the one or more expected response parameters;
• and
• determining whether equipment maintenance is required based upon the comparison.