Bottom antireflective coatings exhibiting enhanced wet strip rates, bottom antireflective coating compositions for forming bottom antireflective coatings, and methods for fabricating the same

A method for fabricating a bottom antireflective coating (BARC) composition, the method comprising the steps of:

• providing components for forming an inorganic-based material;
• combining an absorbing material with the components for forming the inorganic-based material to form a mixture comprising water;
• heating or refluxing the mixture;
• and
• adding a wet strip-rate modifier combination comprising two, three or four of ethanol, n-propanol, dipropylene glycol (DPG), and tetraethylene glycol (TEG), wherein the step of adding is performed before, during, or after the step of heating or refluxing.

A bottom antireflective coating (BARC) comprising:

• an inorganic-based material;
• an absorbing material;
• and
• a short chain linear alcohol and dipropylene glycol (DPG), the short chain linear alcohol and tetraethylene glycol (TEG), DPG and TEG, or the short chain linear alcohol, DPG, and TEG.

A method for forming a bottom antireflective coating (BARC) on a substrate, the method comprising the steps of:

• applying a BARC composition overlying the substrate, wherein the BARC composition comprises:
• an inorganic-based material;
• an absorbing material;
• and
• a wet strip-rate modifier combination comprising a short chain linear alcohol and dipropylene glycol (DPG), the short chain linear alcohol and tetraethylene glycol (TEG), DPG and TEG, or a combination of the short chain linear alcohol, DPG, and TEG;
• and
• baking the substrate.