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OwnerJoong Kee LEE, Byung Won CHO +4inventors
InventorsJoong Kee LEE, Byung Won CHO, Won Young CHANG, Won Young Chang, Joo Man WOO, Ji Hun Park
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The present invention relates to a process of preparing zinc-tin composite transparent conductive oxide films ZnxSnyOz superior in light transmission, interfacial adhesion strength and electric conductivity by an organic chemical deposition method by using an electron cyclotron resonance (ECR). Zinc-tin oxide film composite ZnxSnyOz (x=1, y=8.7, Z=12) stably prepared by an electron-cyclotron chemical vapor deposition according to the present invention is superior to ZnSnO3 and Zn2SnO4 prepared by a physical deposition method in electric conductivity, thereby being applicable in a wide range of electric appliances including a heating element.
A process of preparing a transparent conductive oxide film, the process comprising:
A device for preparing zinc-tin composite transparent conductive oxide film ZnxSnyOz, the device comprising:
A transparent conductive zinc-tin composite oxide film of ZnxSnyOz, wherein x, y and z are in the range of 0.7-1, 8-9 and 11-12, respectively.
A heating element comprising a transparent conductive zinc-tin composite oxide thin film of ZnxSnyOz, wherein x, y and z are in the range of 0.7-1, 8-9 and 11-12, respectively.
Dependencies are inferred from the claim text.