Automatic wafer storage system and a method for controlling the system
AssigneeInotera Memories, Inc.
InventorsHUAN-CHENG LIN, JUNG-PIN LAI
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Abstract
An automatic wafer storage system and a method of controlling the system are disclosed. The automatic wafer storage system includes an analysis module and a storage unit. The analysis module estimates the locations between an idle equipment, a transport tool, and the storage unit, so as to control the storage unit and the transport tool to move to the best location for the transport tool to receive wafers from the storage unit. After that, the transport tool carries the wafers to the idle equipment for processing.
Claims19
An automatic wafer storage system, used for a transport system of a semi-conductor factory, the transport system comprising at least one belt and at least one transport tool, the transport tool moving on the belt in one direction and transporting wafers to an idle equipment for processing, the automatic wafer storage system including:
- an analysis module electrically connected to the transport system and the equipment for estimating the locations of the transport tool and the idle equipment, and then send out a transport order;
- and
- at least one storage unit for storing the wafers movably disposed on the belt and electrically connected with the analysis module, wherein the storage unit receiving the transport order and moves to the best location, the transport tool also moves to the best location and carries the wafers to the idle equipment for processing.
An automatic wafer storage system disposed on a belt for storing wafers, the belt comprising at least one transport tool for transporting the wafers, the transport tool moving on the belt in one direction and carrying the wafers to an idle equipment for processing, the automatic wafer storage system including:
- an analysis module disposed on the belt and electrically connected between the transport tool and the idle equipment;
- and
- at least one storage unit for storing the wafers movably disposed on the belt, the storage unit moves in two directions and is electrically connected with the analysis module, wherein the analysis module estimating the relative locations of the transport tool, the idle equipment, the storage unit and controlling the storage unit to move to the location of the idle equipment, the transport tool carrying the wafers which are stored in the storage unit to the idle equipment for processing.
A method for controlling an automatic wafer storage system, wherein the automatic wafer storage system is used for a transport system of a semi-conductor factory so as to transport wafers to an idle equipment, the transport system comprising at least one belt and at least one transport tool, the automatic wafer storage system comprising at least one analysis module and at least one storage unit, the method for controlling the automatic wafer storage system is as follows:
- the analysis module estimating the relative locations of the transport tool, the idle equipment, and storage unit;
- a first location information generated from the analysis module according to the relative locations of the transport tool, idle equipment, and the storage unit for controlling the storage unit to move to the best location, the transport tool also moving to the best location at the same time, the storage unit transporting the wafers to the transport tool, the transport tool carrying the wafers to an idle equipment for processing;
- or
- a second location information generated from the analysis module according the relative locations of the transport tool, idle equipment, and the storage unit for limiting the storage unit movement, the transport tool moving to the location of the storage unit at the same time, the storage unit transporting wafers stored therein to the transport tool, and then the transport tool carrying the wafers to the idle equipment for processing.
Dependencies are inferred from the claim text.