Low cost moveable mirror

Abstract

It is an object of the present invention to provide a low cost moveable mirror with 2 axes of movement that is suitable for use in an optical application where a relatively large tip of tilt of a mirror is needed in a known series of positions repeatably and rapidly. This object is achieved by providing a planar structure with 4 bending actuators that can be produced through MEMs based manufacturing. The moveable mirror is flexibly connected to the bending actuators so it can be moved on 2 axes. The bending actuators are designed to have substantial length to increase the angular movement of the mirror. Hard stops are provided to provide repeatable and accurate positioning of the mirror for selected positions.

Dependencies are inferred from the claim text.