Stage apparatus, exposure apparatus, and method of manufacturing device

An exposure apparatus including a stage apparatus,

• the stage apparatus comprising:
• a plurality of stages configured to be movable across a plurality of areas,
• a plurality of movable bodies which are provided in one-to-one correspondence with the plurality of stages and are configured to be movable across the plurality of areas,
• a plurality of lines configured to connect each of the plurality of stages to a corresponding one of the plurality of movable bodies,
• a driving unit configured to drive the plurality of movable bodies, and
• a controller configured to control the driving by the driving unit,
• wherein the controller controls the driving unit with the movable body moving in synch with movement of the stage during inter-area movement in which the stage moves across two of the plurality of areas, and stops the driving of the movable body by the driving unit or controls the driving unit with the movable body remaining at a specific target position during intra-area movement in which a process is performed on the stage while the stage moves within one of the plurality of areas.

A method of manufacturing a device, the method comprising:

• exposing a substrate to light using an exposure apparatus including a stage apparatus;
• developing the exposed substrate;
• and
• processing the developed substrate to manufacture the device,
• wherein the stage apparatus comprises:
• a plurality of stages configured to be movable across a plurality of areas,
• a plurality of movable bodies which are provided in one-to-one correspondence with the plurality of stages and are configured to be movable across the plurality of areas,
• a plurality of lines configured to connect each of the plurality of stages to a corresponding one of the plurality of movable bodies,
• a driving unit configured to drive the plurality of movable bodies, and
• a controller configured to control the driving by the driving unit, and
• wherein the controller controls the driving unit so that the movable body moves in synch with movement of the stage during inter-area movement in which the stage moves across two of the plurality of areas, and stops the driving of the movable body by the driving unit or controls the driving unit with the movable body remaining at a specific target position during intra-area movement in which a process is performed on the stage while the stage moves within one of the plurality of areas.