Lithography apparatus
AssigneeNanya Technology Corporation
InventorWei-Cheng Shiu
Life of this patent
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Abstract
A lithography apparatus includes: a light source comprising a first light beam and a second light beam, a photomask, a polarization controlling system positioned between the light source and the photomask, a wafer state for holding a wafer, and a lens positioned between the photomask and the wafer stage. The polarization controlling system diverts the first light beam into a first polarization direction and diverts the second light beam into a second polarization direction, wherein the first polarization direction and the second polarization direction are different from each other.
Claims16
A lithography apparatus comprising:
- a light source comprising a first light beam and a second light beam;
- a photomask comprising a first pattern having a first set of multiple axes and a second pattern having a second set of multiple axes, wherein the first pattern comprises a first axis which is the longest axis of the first set of multiple axes of the first pattern and the second pattern comprises a second axis which is the longest axis of the second set of multiple axes of the second pattern, and wherein the direction of the first axis is different from that of the second axis;
- a polarization controlling system positioned between the light source and the photomask, wherein the polarization controlling system comprises a first polarization controlling unit and a second polarization controlling unit, the first polarization controlling unit diverts a polarization direction of the first light beam to a direction parallel to the first axis, and the second polarization controlling unit diverts a polarization direction of the second light beam to a direction parallel to the second axis;
- a wafer stage for holding a wafer;
- and
- a lens positioned between the photomask and the wafer stage.
A lithography apparatus comprising:
- a light source comprising a first light beam and a second light beam;
- a photomask;
- a polarization controlling system positioned between the light source and the photomask, wherein the polarization controlling system diverts the first light beam to a first polarization direction and diverts the second light beam to a second polarization direction, wherein the first polarization direction and the second polarization direction are different from each other;
- a wafer stage for holding a wafer;
- and
- a lens positioned between the photomask and the wafer stage.
Dependencies are inferred from the claim text.