Exposure Apparatus Having An Element To Be Cooled
AssigneeCanon Kabushiki Kaisha
InventorMakoto Nomoto
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Abstract
An exposure apparatus having an element to be cooled and that exposes a substrate to patterned radiation by using the element. A reservoir houses a liquid coolant therein. A first pump, disposed between the reservoir and the element, supplies the coolant from the reservoir to the element. A heater, disposed between the first pump and the element, heats the coolant supplied from the first pump. A jacket receives the coolant from the heater and cools the element. A second pump, disposed between the jacket and the reservoir, reduces a pressure of the jacket and supplies the coolant from the jacket to reservoir. A cooler, disposed between the second pump and the reservoir, cools the coolant supplied from the second pump.
Claims2
1-9. (canceled)
An exposure apparatus having an element to be cooled and being configured to expose a substrate to patterned radiation by using the element, said apparatus comprising:
- a reservoir configured to house a liquid coolant therein;
- a first pump disposed between said reservoir and the element and configured to supply the coolant from said reservoir to the element;
- a heater disposed between said first pump and the element and configured to heat the coolant supplied from said first pump;
- a jacket configured to receive the coolant from said heater and to cool the element;
- a second pump disposed between said jacket and said reservoir and configured to reduce a pressure of said jacket and to supply the coolant from said jacket to said reservoir;
- and
- a cooler disposed between said second pump and said reservoir and configured to cool the coolant supplied from said second pump.
Dependencies are inferred from the claim text.