Semiconductor Device and Manufacturing Method Thereof
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorKazuaki OHSHIMA
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Abstract
A resistor whose characteristic value can be changed without requiring a photolithography process again is provided. The resistor includes a plurality of first resistor units which is connected serially to each other and a second resistor unit which is connected in parallel to part of the first resistor units. Then, after the measurement of a semiconductor integrated circuit, the second resistor unit is electrically disconnected as necessary. The first resistor units may be either a unit including a single resistor or may be a unit including a plurality of resistors.
Claims10
A method for manufacturing a semiconductor device, comprising:
- forming a plurality of first resistor units connected serially to each other;
- forming a second resistor unit connected in parallel to part of the plurality of first resistor units, the second resistor unit having a lower resistance value than the first resistor units;
- and
- electrically disconnecting the second resistor unit from the part of the first resistors unit.
A method for manufacturing a semiconductor device, comprising:
- forming a plurality of units where a plurality of resistors is connected in parallel to each other using wirings, the units being connected serially to each other;
- and
- electrically disconnecting part of the resistors or the wirings.
A semiconductor device comprising:
- a plurality of first resistor units connected serially to each other;
- and
- a second resistor unit connected in parallel to part of the plurality of first resistor units,
- wherein the second resistor unit has a lower resistance value than the first resistor units.
Dependencies are inferred from the claim text.