Charged particle beam irradiating apparatus

Abstract

The present invention provides a charged particle beam irradiating apparatus capable of simply preventing unevenness or reduction in a peripheral portion of the dose distribution of a charged particle beam. A charged particle beam irradiating apparatus includes scanning electromagnets that scan a charged particle beam and a control device that controls the operations of the scanning electromagnets. In the charged particle beam irradiating apparatus, the control unit changes a scanning speed when the charged particle beam is irradiated along an irradiation line such that a peripheral portion of the dose distribution of the charged particle beam is corrected.

Dependencies are inferred from the claim text.