Film roll, and cleaning method for film depositing apparatus
AssigneeFUJIFILM Corporation
InventorMasami NAKAGAME
Life of this patent
Estimating the term…
Abstract
A film roll comprises an elongated substrate film for film deposition wound into a roll, the substrate film including: at least one elongated product-film portion having a pair of surfaces opposite with each other, with one of the surfaces serving as a surface for film deposition; and at least one cleaning-film portion connected to an end of the product-film portion and having a pair of surfaces opposite with each other, with at least one of the surfaces serving as a cleaning surface having a dust removal function.
Claims17
A film roll comprising an elongated substrate film for film deposition wound into a roll, the substrate film including:
- at least one elongated product-film portion having a pair of surfaces opposite with each other, with one of the surfaces serving as a surface for film deposition;
- and
- at least one cleaning-film portion connected to an end of the product-film portion and having a pair of surfaces opposite with each other, with at least one of the surfaces serving as a cleaning surface having a dust removal function.
Dependencies are inferred from the claim text.