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US 2010/0063753 A1Published application
Integrated vapor delivery systems for chemical vapor deposition precursors
AssigneePalo Alto Research Center Incorporated
InventorsDavid P. Bour, Christopher L. Chua, Zhihong Yang
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Abstract
One disclosed feature of the embodiments is a control processor in a vapor delivery system for chemical vapor deposition precursors. A pressurization rate processor calculates first and second pressurization rate curves at first and second time instants. A volume calculator computes consumed volume based on first and second volumes at the respective first and second time instants. The first and second volumes are computed using slopes of lines fitting the first and second pressurization rate curves.
Claims25
An apparatus comprising:
- a flow controller to control gas flow through a bubbler, the flow controller providing a plurality of flow measurements at first and second instants;
- a pressure controller to measure pressure in the bubbler, the pressure controller providing a plurality of pressure measurements corresponding to the plurality of flow measurements at the first and second instants;
- and
- a control processor coupled to the flow controller and the pressure controller to determine amount of precursor chemical in the bubbler based on volume consumed between first and second instants using the plurality of flow measurements and the corresponding plurality of pressure measurements.
1 more element
A method comprising:
- controlling gas flow through a bubbler to obtain a plurality of flow measurements at first and second instants;
- measuring pressure in the bubbler to obtain a plurality of pressure measurements corresponding to the plurality of flow measurements at the first and second instants;
- and
- determining amount of precursor chemical in the bubbler based on volume consumed between first and second instants using the plurality of flow measurements and the corresponding plurality of pressure measurements.
1 more element
An article of manufacture comprising:
- a machine-accessible storage medium including data that, when accessed by a machine, causes the machine to perform operations comprising:
- controlling gas flow through a bubbler to obtain a plurality of flow measurements at first and second instants;
- measuring pressure in the bubbler to obtain a plurality of pressure measurements corresponding to the plurality of flow measurements at the first and second instants;
- and
- determining amount of precursor chemical in the bubbler based on volume consumed between first and second instants using the plurality of flow measurements and the corresponding plurality of pressure measurements.
2 more elements
A system comprising:
- a bubbler containing metal organic sources used in chemical vapor deposition;
- a valve and sensing unit coupled to the bubbler having a flow valve and sensing unit and a pressure valve and sensing unit;
- and
- an integrated flow and pressure controller coupled to the valve and sensing unit, the integrated flow and pressure controller comprising:
- a flow controller to control gas flow through the bubbler using the flow valve and sensing unit, the flow controller providing a plurality of flow measurements at first and second instants,
- a pressure controller to measure pressure in the bubbler using the presser valve and sensing unit, the pressure controller providing a plurality of pressure measurements corresponding to the plurality of flow measurements at the first and second instants, and
- a control processor coupled to the flow controller and the pressure controller to determine amount of precursor chemical in the bubbler based on volume consumed between first and second instants using the plurality of flow measurements and the corresponding plurality of pressure measurements.
4 more elements
An apparatus comprising:
- a pressurization rate processor to calculate first and second pressurization rate curves at first and second time instants;
- and
- a volume calculator coupled to the pressurization rate processor to compute consumed volume based on first and second volumes at the respective first and second time instants, the first and second volumes being computed using slopes of lines fitting the first and second pressurization rate curves.
Dependencies are inferred from the claim text.