Compliant base to increase contact for micro- or nano-fibers
AssigneeThe Regents of the University of California
InventorsCarmel Majidi, Richard E. Groff, Ronald S. Fearing, Steven D. Jones
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Abstract
A fabricated microstructure includes a substrate, a primary fiber, and a plurality of base fibers. The primary fiber has a width less than about 5 microns. Each base fiber of the plurality of base fibers has a first end attached to the primary fiber and a second end attached to the substrate. Each base fiber has a width less than the width of the primary fiber.
Claims38
A fabricated microstructure, comprising:
- a substrate;
- a primary fiber having a width less than about 5 microns;
- and
- a plurality of base fibers, each base fiber having a first end attached to the primary fiber and a second end attached to the substrate, wherein each base fiber has a width less than the width of the primary fiber.
A method of fabricating a microstructure having a plurality of micro- or nano-fibers attached to a compliant substrate, comprising:
- stacking a first porous mold on a second porous mold, wherein the first and second porous molds have different pore sizes, and wherein the first and second porous molds are shaped to form a plurality of primary fibers, each primary fiber having a width less than about 5 microns, and each primary fiber having a plurality of base fibers, wherein each base fiber has a width less than the width of the primary fiber;
- filling the stacked first and second porous molds with polymer;
- curing the polymer;
- after curing the polymer, etching away the first and second porous molds;
- and
- cutting the polymer using a cutting beam.
A fabricated microstructure, comprising:
- a substrate;
- and
- a micro- or nano-fiber having a base attached to the substrate, wherein the fiber has a width less than about 5 microns, wherein the base includes a first double-cantilever structure, and wherein the first double-cantilever structure comprises two parallel sides separated by a gap, wherein the first double-cantilever structure permits compliance of the fiber at the base in a first direction perpendicular to the two parallel sides of the first double-cantilever structure.
A fabricated microstructure, comprising:
- a substrate;
- and
- a micro- or nano-fiber having a base attached to the substrate, wherein the fiber has a width less than about 5 microns, wherein the base includes a spring structure, and wherein spring structure permits rotational compliance of the fiber at the base.
A fabricated microstructure, comprising:
- a substrate;
- and
- a micro- or nano-fiber having a base attached to the substrate, wherein the fiber has a width less than about 5 microns, wherein the base includes a flexure support structure, and wherein the flexure support structure permits rotational compliance of the fiber at the base.
A method of fabricating a microstructure having a plurality of micro- or nano-fibers attached to a compliant substrate, comprising:
- inserting a template having an array of holes into the compliant substrate;
- applying material for the fibers on top of the template;
- planarizing the top of the template after the material for the fibers has been applied;
- and
- removing the template to release the fibers.
A fabricated microstructure, comprising:
- a substrate;
- and
- a micro- or nano-fiber having a base attached to the substrate, wherein the fiber has a width less than about 5 microns, and wherein the substrate is formed from a compliant material.
Dependencies are inferred from the claim text.