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US 2010/0061901 A1Published application
Apparatus for producing trichlorosilane
AssigneeMitsubishi Materials Corporation
InventorsMitsutoshi Narukawa, Yuji Shimizu
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Abstract
An apparatus for producing trichlorosilane includes a reaction container in which a supply gas containing silicon tetrachloride and hydrogen is supplied therein and a reaction product gas containing trichlorosilane and hydrogen chloride is produced; a heat transfer body which is filled in the reaction container, which is formed of a material having a melting point of at least higher than 1,400° C., and which has a void part which enables a gas to be passed; and a heating mechanism heating the heat transfer body in the reaction container.
Claims5
An apparatus for producing trichlorosilane, comprising:
- a reaction container in which a supply gas containing silicon tetrachloride and hydrogen is supplied therein and a reaction product gas containing trichlorosilane and hydrogen chloride is produced;
- a heat transfer body which is filled in the reaction container, which is formed of a material having a melting point of at least higher than 1,400° C., and which has a void part which enables a gas to be passed;
- and
- a heating mechanism which heats the heat transfer body in the reaction container.
1 more element
Dependencies are inferred from the claim text.