Vertical thermal processing apparatus

A vertical thermal processing apparatus comprising:

• a substrate supporter capable of supporting a plurality of substrates to be processed at predetermined intervals therebetween in a vertical direction;
• a transfer mechanism including at least one transfer plate configured to transfer a plurality of substrates to be processed between the substrate supporter and a container capable of containing a plurality of substrates to be processed;
• and
• a thermal processing furnace configured to thermally process the plurality of substrates to be processed that have been loaded thereinto together with the substrate supporter;
• wherein:
• the transfer plate has a cantilevered support structure horizontally extending from a proximal end thereof to a distal end thereof in a fore and aft direction;
• an upper surface of the transfer plate is provided with plurality of support projections configured to horizontally support the substrate to be processed at a substantially central position thereof and a rear position thereof in the fore and aft direction;
• and
• the substrate to be processed is not supported on the distal portion of the transfer plate.