Light generating apparatus and method of controlling the same
AssigneeSamsung Electronics Co., Ltd.
InventorsYoonsun Choi, Jinhwan Kim, Hongseok Lee
Life of this patent
Estimating the term…
Abstract
A light beam generating apparatus and method of controlling the same is provided. The light beam generating apparatus may include a light source, a beam expander collimating a light beam emitted from the light source, an optical shutter selectively transmitting a light beam transmitted through the beam expander, and a focusing lens focusing a light beam transmitted the optical shutter. The optical shutter in the light generating apparatus can selectively transmit a light beam based on on/off control of the optical shutter on a pixel-by-pixel basis. This may permit one-dimensional, two-dimensional and three-dimensional nano patterns having various periods and directions to be manufactured.
Claims23
A light generating apparatus comprising:
- a light source emitting a light beam;
- a beam expander that enlarges and collimates the light beam;
- an optical shutter at least one of selectively transmitting and selectively reflecting a light beam transmitted through the beam expander to form at least two light beams;
- and
- a focusing lens focusing the at least two light beams on a same location such that the at least two light beams interfere with each other.
The light generating apparatus 12, further comprising:
- a polarizer polarizing the at least two light beams provided by the beam splitter, the polarizer being between the beam splitter and the focusing lens.
The light generating apparatus 12, wherein the beam splitter further includes a polarization beam splitter.
The light generating apparatus 12, wherein the optical shutter further includes at least one of a liquid crystal on silicon (LCoS) and a digital micro mirror device (DMD).
A light generating apparatus for manufacturing a nano pattern comprising:
- an apparatus selectively providing a light beam and including an on/off control;
- an optical shutter including a plurality of pixels, the on/off control controlling the optical shutter on a pixel-by-pixel basis and the optical shutter at least one of selectively transmits and selectively reflects at least two light beams;
- and
- a photosensitive layer receiving an interference pattern formed by the at least two light beams such that a nano pattern is provided.
A method of controlling a light generating apparatus, the method comprising:
- emitting a light beam from a light source;
- enlarging the light beam emitted from the light source;
- collimating the light beam emitted from the light source;
- at least one of selectively reflecting and selectively transmitting a collimated light beam to form at least two light beams;
- and
- focusing the at least two light beams on a same location such that that the two light beams interfere with each other.
Dependencies are inferred from the claim text.