Semiconductor device
AssigneeSamsung Electronics Co., Ltd.
InventorsJoo-Young LEE, Ki-Nam Kim
Life of this patent
Estimating the term…
Abstract
A semiconductor device includes a semiconductor substrate having an active region and an isolation region. A gate structure is provided on the semiconductor device. First and second impurity regions are provided in the substrate on both sides of the gate structure. A pad electrode is provided to contact the first impurity region. Because the pad electrode is provided on the first impurity region of the semiconductor device, the contact plug does not directly contact the active region. Accordingly, failures caused by damage to the active region may be prevented.
Claims25
A semiconductor device, comprising:
- a semiconductor substrate including an active region and an isolation region;
- a gate structure located on the semiconductor substrate;
- first and second impurity regions located in the substrate on both sides of the gate structure;
- and
- a pad electrode contacting the first impurity region.
5-7. (canceled)
A DRAM device, comprising:
- a semiconductor device, comprising:
- a semiconductor substrate including an active region and an isolation region;
- a gate structure located on the semiconductor substrate;
- first and second impurity regions located in a surface of the substrate on both sides of the gate structure;
- a pad electrode to contact the first impurity region of the semiconductor substrate;
- a bit line structure electrically connected to the second impurity region;
- a contact plug contacting the pad electrode;
- and
- a capacitor electrically connected to the contact plug.
16-22. (canceled)
(canceled)
A semiconductor device, comprising:
- a substrate having an active region and an isolation region;
- and
- at least one gate structure located in the active region of the substrate,
- at least one impurity region in the substrate adjacent to the gate structure and the isolation region, and
- a first pad electrode located on the at least one impurity region and the isolation region.
(canceled)
33-44. (canceled)
Dependencies are inferred from the claim text.