Photoelectric conversion device

A method for manufacturing a photoelectric conversion device comprising:

• forming damaged layers in a first single crystal semiconductor substrate and in a second single crystal semiconductor substrate by introducing ions from first surfaces of the first single crystal semiconductor substrate and the second single crystal semiconductor substrate;
• forming a first electrode and a fourth electrode which are in contact with the first surfaces of the first single crystal semiconductor substrate and the second single crystal semiconductor substrate, respectively;
• bonding the first surfaces provided with the first electrode and the fourth electrode of the first single crystal semiconductor substrate and the second single crystal semiconductor substrate to a support substrate with an insulating layer interposed between the first single crystal semiconductor substrate and the support substrate, and between the second single crystal semiconductor substrate and the support substrate;
• dividing the first single crystal semiconductor substrate and the second single crystal semiconductor substrate at the damaged layers levels so that a first single crystal semiconductor layer and a second single crystal semiconductor layer are fixed over the support substrate side by side;
• forming impurity-containing semiconductor layers having one conductivity type over surfaces of the first single crystal semiconductor layer and the second single crystal semiconductor layer which are opposite from the support substrate;
• forming a through hole which reaches the first electrode through the first single crystal semiconductor layer and a through hole which reaches the fourth electrode through the second crystal semiconductor layer;
• and
• simultaneously forming a second electrode, a third electrode, a fifth electrode, and a sixth electrode which are in contact with the first single crystal semiconductor layer, the first electrode, the second single crystal semiconductor layer, and the fourth electrode respectively, in a manner that the second electrode and the sixth electrode are connected.