Reticle Cleaning Device

A reticle cleaning device, comprising:

• a chamber body having a sealed chamber in which is disposed with a reticle stage for carrying a reticle, said reticle including a frame and on said frame being attached with a layer of protective membrane;
• an optical component for transmitting a light beam to said protective membrane and receiving light beam reflected from said protective membrane, and for outputting a signal to indicate upward and downward expansion change of said protective membrane on said reticle;
• a pump for exhausting air in said sealed chamber of said chamber body to form negative pressure in said sealed chamber in order to separate contaminants on said reticle;
• and
• a controller for receiving said signal of said optical component, said controller outputting another signal to terminate operation of said pump when said signal indicates that upward and downward expansion change of said protective membrane on said reticle is larger than a pre-set value.

A reticle cleaning method, comprising following steps:

• providing a reticle inside a chamber body, wherein on said reticle is disposed with a protective membrane;
• providing an optical component, said optical component transmitting a light beam to said protective membrane on said reticle and receiving light beam reflected from said protective membrane to monitor upward and downward expansion change of said protective membrane on said reticle;
• exhausting air inside said sealed body to form negative pressure in said sealed body in order to separate contaminants on said reticle;
• wherein, when said optical component detects that upward and downward expansion change of said protective membrane on said reticle is larger than a pre-set value, exhaustion of air inside said sealed body is terminated.