System and method for plasma plating
AssigneeBasic Resources, Inc.
InventorsJerry D Kidd, Craig D. Harrington, Daniel N. Hopkins
Life of this patent
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AssigneeBasic Resources, Inc.
InventorsJerry D Kidd, Craig D. Harrington, Daniel N. Hopkins
Estimating the term…
An exemplary system and method for plasma plating are disclosed. The system may comprise a vacuum chamber, a filament positioned within the vacuum chamber and operable to receive a depositant, and a depositant positioned at the filament. The system may also comprise a platform positioned within the vacuum chamber, a substrate positioned at the platform, a DC power supply generating a DC signal, a radio frequency transmitter generating a radio frequency signal, an electrically conductive path that electrically couples the DC signal and the radio frequency signal to the substrate, and a filament power control electrically coupled to the filament and generating a current through the filament at an amplitude to generate heat in the filament to melt the depositant.
A system for plasma plating comprising:
The system of claim 2, further comprising a gas in the vacuum chamber.
Dependencies are inferred from the claim text.