Signal Coupling System For Scanning Microwave Microscope
AssigneeAgilent Technologies, Inc.
InventorsHassan Tanbakuchi, Matthew Richter, Michael Whitener
Life of this patent
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Abstract
A signal coupling system interposed between a scanning probe and a measurement instrument provides signal communication between the scanning probe and the measurement instrument. The signal coupling system has a pre-stressed shape when the scanning probe is in a neutral position. The pre-stressed shape is designated to provide a characteristic impedance of the signal coupling system that varies linearly as a function of displacement of the scanning probe from the neutral position when the scanning probe is displaced, relative to the neutral position, over a designated range of displacements.
Claims20
An apparatus, comprising:
- a scanning probe;
- a measurement instrument;
- and
- a signal coupling system having a pre-stressed shape when the scanning probe is in a neutral position, the signal coupling system interposed between the scanning probe and the measurement instrument, providing signal communication between the scanning probe and the measurement instrument, wherein the pre-stressed shape is designated to provide a characteristic impedance of the signal coupling system that has a corresponding return loss that varies linearly as a function of displacement of the scanning probe from the neutral position when the scanning probe is displaced relative to the neutral position over a designated range of displacements.
An apparatus, comprising:
- a scanning probe enabled to be displaced across a substrate surface in at least one dimension, the scanning probe having a resonant structure including a tip enabled to be positioned proximate to the substrate surface;
- a measurement instrument enabled to characterize at least one electrical parameter of the resonant structure at one or more measurement frequencies;
- and
- a signal coupling system providing signal communication between the scanning probe and the measurement instrument, the signal coupling system including a coaxial cable disposed about a diameter of the scanning probe and having a spiral shape that undergoes a corresponding mechanical deformation for each displacement of the scanning probe when the scanning probe is displaced across the substrate surface, wherein the corresponding mechanical deformation is distributed over a designated length of the coaxial cable that is sufficiently long to enable the at least one electrical parameter of the resonant structure to be distinguished from a change in characteristic impedance of the coaxial cable induced by the mechanical deformation.
Dependencies are inferred from the claim text.