Teaching device and teaching method
AssigneeNEC Electronics Corporation
InventorTaketora Ogata
Life of this patent
Estimating the term…
Abstract
Teaching of height of a carrier stage relative to a transfer arm is performed with high accuracy. A teaching device is used when teaching the height of a carrier stage 5 relative to a transfer arm 4 in a transfer system is performed. The transfer system includes the transfer arm 4 that transfers a wafer and the carrier stage 5 with a carrier 1 that holds the wafer mounted thereon. The teaching device includes a teaching jig 10 and a detector 20. The teaching jig 10 includes a disc 11 arranged on a slot base 2 in the carrier 1 and a head member 12 attached to the disc. The head member 12 has a projecting portion designed to be located within an optimal gap between the disc 11 and the transfer arm 4 disposed below the disc 11.
Claims14
A teaching device used when teaching of height of a carrier stage relative to a transfer arm in a transfer system is performed, the transfer system including the transfer arm that transfers a wafer and the carrier stage with a carrier that holds the wafer mounted thereon, the teaching device comprising:
- a teaching jig including a disc arranged on a slot base in the carrier and a head member attached to the disc, the head member having a projecting portion designed to be located within an optimal gap between the disc and the transfer arm below the disc;
- and
- a detector that detects electrical contact between the projecting portion and the transfer arm.
A teaching device used when teaching of a height of a carrier stage relative to a transfer arm in a transfer system is performed, the transfer system including the transfer arm that transfers a wafer and the carrier stage with a carrier that holds the wafer mounted thereon, the teaching device comprising:
- a disc arranged on a slot base in the carrier;
- a teaching jig mounted on the transfer arm and having a projecting portion designed to be located within an optimal gap between the disc and the transfer arm below the disc arranged on the slot base;
- and
- a detector that detects electrical contact between the projecting portion and the disc.
A teaching method of teaching a height of a carrier stage relative to a transfer arm in a transfer system, the transfer system comprising the transfer arm that transfers a wafer and a carrier stage with a carrier that holds the wafer mounted thereon, the teaching method comprising:
- moving the carrier stage so that the transfer arm is located below a slot in a predetermined stage of the carrier;
- extending the transfer arm into the carrier to connect a first clip to the transfer arm;
- arranging a teaching jig on a slot base associated with the slot in the predetermined stage of the carrier to connect a second clip to the teaching jig, the teaching jig having a projecting portion on a disc and being arranged on the slot base with the projecting portion pointed downward;
- connecting wirings respectively associated with the first clip and the second clip to a detector;
- and
- raising or lowering the carrier stage to detect an electrical contact switching position between the projecting portion and the transfer arm by the detector.
Dependencies are inferred from the claim text.