Method and apparatus for producing a solar cell module with integrated laser patterning
AssigneeApplied Materials, Inc.
InventorStephan Wieder
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Abstract
The present invention refers to a method as well as an apparatus for producing a solar cell module having an array of photovoltaic cells on a common substrate, the apparatus comprising at least one treating chamber for depositing a layer on a substrate and at least one laser for patterning the deposited layer, wherein a treating chamber for laser patterning comprising means for setting up technical vacuum conditions is provided for.
Claims17
Apparatus for producing a solar cell module having an array of photovoltaic cells on a common substrate, comprising at least one treating chamber for depositing a layer on a substrate and at least one patterning means for patterning the deposited layer,
- wherein
- a treating chamber for patterning comprising means for setting up technical vacuum conditions is provided for.
Method for producing a solar cell module having an array of photovoltaic cells on a common substrate, comprising several steps of depositing various layers and several steps of patterning the deposited layers to form a plurality of separated photovoltaic cells in an array,
- wherein
- the step of patterning the deposited layer is carried out under technical vacuum conditions.
Method for producing a solar cell module having an array of photovoltaic cells on a common substrate, comprising several steps of depositing various layers and several steps of patterning the deposited layers to form a plurality of separated photovoltaic cells in an array,
- wherein
- the substrate is kept under vacuum conditions defined by a pressure below atmospheric pressure during at least one depositing step and at least one successive patterning step without leaving vacuum area.
Dependencies are inferred from the claim text.