Semiconductor wafer
AssigneeSumco Corporation
InventorTomohiro HASHII
Life of this patent
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Abstract
The present invention is a semiconductor wafer including an orientation identification mark, which is used for identifying crystal orientation, on a peripheral surface thereof, in which the orientation identification mark has a terraced structure that is concave toward an inner diameter direction of the semiconductor wafer with respect to a portion outside of the orientation identification mark on the peripheral surface, and has a planar surface that is orthogonal to a diameter direction of the semiconductor wafer; and has a gloss different from that of the portion outside of the orientation identification mark on the peripheral surface.
Claims3
A semiconductor wafer comprising an orientation identification mark used for identifying crystal orientation, on a peripheral surface thereof,
- wherein the orientation identification mark has a terraced structure that is concave toward an inner diameter direction of the semiconductor wafer with respect to a portion outside of the orientation identification mark on the peripheral surface, and has a planar surface that is orthogonal to a diameter direction of the semiconductor wafer;
- and has a gloss different from that of the portion outside of the orientation identification mark on the peripheral surface.
Dependencies are inferred from the claim text.