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US 2009/0289329 A1Published application
Differential Varactor
AssigneeAtmel Corporation
InventorsAdam H. Pawlikiewicz, Samir El Rai
Life of this patent
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Abstract
A high-Q differential varactor includes reduced inner spacing dimensions between differential fingers.
Claims25
A differential varactor comprising:
- a substrate;
- insulating material deposited on the substrate;
- and
- differential fingers formed on the insulating material, where inner spacing between the differential fingers is insulating material, and an inner spacing dimension is sized to reduce a resistance of a plurality of doped regions in the substrate and to increase a Q-factor of the differential varactor.
1 more element
A system comprising:
- an electronic oscillator that includes one or more differential varactors, the one or more differential varactors including:
- differential fingers, where the inner spacing between the differential fingers is insulating material.
A system comprising:
- an electronic amplifier that includes one or more differential varactors, the one or more differential varactors including:
- differential fingers, where the inner spacing between the differential fingers is insulating material.
A method of fabricating a differential varactor comprising:
- depositing insulating material on a substrate;
- depositing gate material on the insulating material to form a layer;
- forming differential fingers from the gate material, where inner spacing in the layer between the differential fingers is insulating material;
- and
- sizing an inner spacing dimension to reduce a resistance of a plurality of doped regions in the substrate and increase a Q-factor of the differential varactor.
2 more elements
A differential varactor comprising:
- a substrate;
- differential fingers formed on the substrate, where inner spacing between the differential fingers is the substrate, and an inner spacing dimension is sized to reduce a resistance of a plurality of doped regions in the substrate and to increase a Q-factor of the differential varactor.
Dependencies are inferred from the claim text.