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US 2009/0289313 A1Published application
Micro electric mechanical system device and method of producing the same
AssigneeKabushiki Kaisha Toshiba
InventorHiroaki YAMAZAKI
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Abstract
A MEMS device comprises a substrate, an island-shaped first insulating layer formed on the substrate, a second insulating film formed on the top and side surfaces of the first insulating layer and the top surface of the substrate, and having a thickness smaller than that of the first insulating layer, a metal layer formed on the second insulating film in an island-shaped region where the first insulating layer is formed, and a MEMS system element formed on the metal layer.
Claims20
A micro electric mechanical system device, comprising:
- a substrate;
- an island-shaped first insulating layer formed on the substrate;
- a second insulating film formed on the top and side surfaces of the first insulating layer and the top surface of the substrate, and having a thickness smaller than that of the first insulating layer;
- a metal layer formed on the second insulating film in an island-shaped region where the first insulating layer is formed;
- and
- a micro electric mechanical system element formed on the metal layer.
3 more elements
A method of producing a micro electric mechanical system device, comprising:
- forming an island-shaped first insulating layer on a substrate;
- forming a second insulating film having a thickness smaller than that of the first insulating layer on the top and side surfaces of the first insulating layer and the top surface of the substrate;
- forming a pattern of a metal layer on the second insulating film formed on the island-shaped first insulating layer;
- etching the second insulating film and forming a first opening to expose the metal layer;
- forming a sacrifice layer on the first opening of the second insulating film;
- forming a micro electric mechanical system structure body on the sacrifice layer;
- and
- removing the sacrifice layer to release a movable portion of the micro electric mechanical system structure body.
5 more elements
Dependencies are inferred from the claim text.