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US 2009/0289196 A1Published application
Deflection Signal Compensation for Charged Particle Beam
AssigneeFEI Company
InventorsRaymond Hill, Steve Ake Rosenberg, Daniel B. Downer
Life of this patent
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Abstract
Charged particles that are in transit through a deflection system when the beam is repositioned do not received the correct deflection force and are misdirected. By independently applying signals to the multiple stages of a deflection system, the number of misdirected particles during a pixel change is reduced.
Claims17
A method of directing charged particle beams in a charged particle beam system, comprising:
- applying a first deflection signal to a first stage deflector, the first deflection signal corresponding to a first dwell point;
- and
- applying a second signal to a second stage deflector, the second deflection signal corresponding to the first dwell point and being delayed with respect to the first deflection signal.
A charged particle beam system comprising:
- a source of particles;
- a first stage charged particle deflector;
- a second stage charged particle deflector;
- a voltage source for applying signals to the first and second stage deflectors, the system being programmed to apply a second stage detector signal corresponding to a particular dwell point at a different time than when a first stage deflector signal was applied for the same dwell point, the time difference between the application of the second stage deflector signal and the application of the first stage deflector signal is determined by the time of flight of the charged particles between components of the beam system.
1 more element
Dependencies are inferred from the claim text.