Ultra high precision measurement tool with control loop
AssigneeICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
InventorJuergen FROSIEN
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Abstract
A focused ion beam device is described comprising a gas field ion source with an emitter emitting an ion beam including ions of gas, an ion beam column and a beam current control loop comprising a beam current measurement device. Furthermore, the focused ion beam device may have a sample charge control comprising measuring the sample charge. A method of operating a focused ion beam device is provided comprising applying a voltage between an emitter an electrode, applying gas to the emitter, emitting ions of a gas from the emitter and controlling a beam current by measuring the beam current with a beam current measurement device.
Claims25
Focused ion beam device, comprising
- a gas field ion source with an emitter emitting an ion beam including ions of gas;
- an ion beam column;
- and
- a beam current control loop comprising a beam current measurement device.
Method of operating an ion beam device, having an ion beam column;
- a gas field ion source with an emitter in a emitter region, the method comprising:
- applying a voltage between the emitter and an electrode with a voltage source;
- applying a gas to the emitter region by a gas feeding unit;
- emitting ions of a gas from the emitter;
- and
- controlling a beam current by measuring the beam current with a beam current measurement device and by feeding the information to a control connected to at least one of the voltage source, the condenser voltage and the gas feeding unit.
Dependencies are inferred from the claim text.