Light beam scanning apparatus, laser machining apparatus, test method and laser machining method
AssigneeCanon Kabushiki Kaisha
InventorShinji Ueda
Life of this patent
Estimating the term…
Abstract
An apparatus for scanning a light beam, the apparatus comprises a mirror configured to reflect an incident light beam, a motor configured to rotate the mirror so change a direction along which the light beam reflected by the mirror travels, a detector configured to detect tilt of a detected region of the mirror with respect to a rotation angle of the mirror, and a processor configured to calculate an amount of tilt of the mirror with respect a direction along a rotation axis of the motor, based on the rotation angle of the mirror and the tilt of the detected region detected by the detector.
Claims10
An apparatus for scanning a light beam, the apparatus comprising:
- a mirror configured to reflect an incident light beam;
- a motor configured to rotate the mirror so change a direction along which the light beam reflected by the mirror travels;
- a detector configured to detect tilt of a detected region of the mirror with respect to a rotation angle of the mirror;
- and
- a processor configured to calculate an amount of tilt of the mirror with respect a direction along a rotation axis of the motor, based on the rotation angle of the mirror and the tilt of the detected region detected by the detector.
A laser machining apparatus comprising:
- a scanning apparatus for scanning a laser light;
- and
- a laser apparatus configured to irradiate the mirror of the scanning apparatus with the laser light, wherein an irradiation position of the laser light on a work to be machined is controlled by a rotation angle of the mirror,
- the scanning apparatus comprising:
- a mirror configured to reflect an incident laser light;
- a motor configured to rotate the mirror so change a direction along which the laser light reflected by the mirror travels;
- a detector configured to detect tilt of a detected region of the mirror with respect to a rotation angle of the mirror;
- and
- a processor configured to calculate an amount of tilt of the mirror with respect a direction along a rotation axis of the motor, based on the rotation angle of the mirror and the tilt of the detected region detected by the detector.
A test method for an apparatus for scanning a light beam, the apparatus including a mirror configured to reflect an incident light beam, and a motor configured to rotate the mirror to change a direction along which the light beam reflected by the mirror travels, the method comprising steps of:
- measuring a rotation angle of the mirror;
- detecting tilt of a detected region of the mirror with respect to the rotation angle;
- and
- obtaining an amount of tilt of the mirror with respect a direction along a rotation axis of the motor, based on the rotation angle of the mirror and the tilt of the detected region.
A laser machining method using an apparatus for scanning a laser light, the apparatus including a mirror configured to reflect an incident laser light, and a motor configured to rotate the mirror to change a direction along which the laser light reflected by the mirror travels, the method comprising steps of:
- obtaining an amount of tilt of the mirror;
- and
- machining a work to be machined by irradiating the work with the laser after the amount of tilt of the mirror falls within an allowable value,
- wherein the amount of tilt of the mirror is obtained by a method comprising steps of:
- measuring a rotation angle of the mirror;
- detecting tilt of a detected region of the mirror with respect to the rotation angle;
- and
- obtaining an amount of tilt of the mirror with respect a direction along a rotation axis of the motor, based on the rotation angle of the mirror and the tilt of the detected region.
Dependencies are inferred from the claim text.