Assessment method for process improvement decisions
AssigneeInotera Memories, Inc.
InventorSHIH-LUNG CHEN
Life of this patent
Estimating the term…
Abstract
A risk assessment method for process improvement decisions applying for semiconductor process change comprises: performing a risk assessment evaluation to compute a polarity (plurality?) of items corresponding to their values, generating a risk assessment evaluation value to determine if the risk assessment evaluation value is in a risk setting value, go to next two steps; not, go to next step; performing an active inspect for the polarity (plurality?) of items corresponding to their item setting values, if not satisfied with the active inspect, repeat the above step; if not, transferring the semiconductor process change to online process.
Claims18
An assessment method for process improvement decisions which is applicable to a semiconductor process change, comprising the following steps:
- performing a risk assessment evaluation computation for a plurality of items each with a corresponding value, wherein the product of the corresponding value is for generating a risk assessment evaluation value;
- comparing and determining whether the risk assessment evaluation value has exceeded a predetermined risk value or not, if not, then go to the final step of transferring the semiconductor process change to assembly line process;
- if yes, then performing an active inspection for the corresponding values of the plurality of items against their respective predetermined item setting values, in order to determine if the predetermined item setting values has been exceeded or not;
- next, if the predetermined item setting values has been exceeded, repeat the above step of risk assessment evaluation value comparison;
- otherwise
- if the predetermined item setting values has not been exceeded, then go to the final step of transferring the semiconductor process change to online process.
An assessment method for process improvement decisions which is applicable to a semiconductor process change, comprising the following steps:
- classifying the plurality of items concerning the semiconductor process change;
- performing a risk assessment evaluation computation for a plurality of items each with a corresponding value;
- generating a risk assessment evaluation value, wherein the risk assessment evaluation value is the product of the corresponding values;
- comparing and determining whether the risk assessment evaluation value has exceeded a predetermined risk value or not, if not, then go to the final step of transferring the semiconductor process change to assembly line process;
- if yes, then performing an active inspection for the corresponding values of the plurality of items against their respective predetermined item setting values, in order to determine if the predetermined item setting values has been exceeded or not;
- next, if the predetermined item setting values has been exceeded, repeat the above step of risk assessment evaluation value comparison;
- otherwise if the predetermined item setting values has not been exceeded, then go to the final step of transferring the semiconductor process change to online process.
Dependencies are inferred from the claim text.