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US 2009/0276182 A1Published application
Machine fault detection method
AssigneeInotera Memories, Inc.
InventorsYI FENG LEE, CHUN CHI CHEN, YUN-ZONG TIAN
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AssigneeInotera Memories, Inc.
InventorsYI FENG LEE, CHUN CHI CHEN, YUN-ZONG TIAN
Estimating the term…
A machine fault detection method is applied to a plurality of machines. The machines are used for processing at least one wafer-in-process (WIP). The method includes the flowing steps. A statistical database of the wafer-in-process is provided. An association rules is used to search and survey the statistical database in order to calculate a support degree and a reliability degree. A threshold is selected to determine whether the support degree and the reliability degree have surpassed the threshold or not. When the support degree and the reliability degree have surpassed the threshold, a root cause error in the statistical database corresponded by the support degree and the reliability degree is determined. When the support degree and the reliability degree have not surpassed the threshold, the above steps are repeated.
A machine fault detection method, applied to a plurality of machines and the machines are used for processing at least one wafer-in-process (WIP), comprising:
A machine fault detection method, applied to a plurality of machines and the machines are used for processing at least one wafer-in-process, comprising:
Dependencies are inferred from the claim text.