Substrate processing system

A substrate processing method implemented in a substrate processing system comprising an etching apparatus that carries out plasma etching processing on a substrate and a vacuum-type substrate transferring apparatus to which the etching apparatus is connected, the etching apparatus having therein an electrostatic chuck that electrostatically attracts the substrate, the substrate processing method comprising:

• a first step of forming a protective film on a rear surface of the substrate before the plasma etching processing is carried out, the protective film preventing the rear surface of the substrate from being scratched by the electrostatic chuck during the plasma etching processing;
• a second step of electrostatically attracting the substrate to the electrostatic chuck such that the electrostatic chuck directly contacts the rear surface of the substrate and of carrying out the plasma etching processing on the substrate;
• and
• a third step of removing the protective film from the rear surface of the substrate after the plasma etching processing has been carried out.