Film-forming apparatus, film-forming method and recording medium

A recording medium recorded with a program for causing a computer to carry out a film forming method in a film forming apparatus comprising:

• a processing chamber for holding therein a to-be-processed substrate;
• a first gas supplying means for supplying into the processing chamber a first vapor source including a metal alkoxide having a tertiary butoxyl group as a ligand;
• a second gas supplying means for supplying into the processing chamber a second vapor source including a silicon alkoxide source;
• and
• a pre-reaction means for causing pre-reactions of the first vapor source and the second vapor source,
• characterized in that the film forming method comprises:
• a first step supplying the first vapor source and the second vapor source to the pre-reaction means and causing pre-reactions of the first vapor source and the second vapor source;
• and
• a second step supplying the first vapor source and the second vapor source after the pre-reactions into the processing chamber, so as to solve the problem described above.