Systems and methods for sensing properties of a workpiece and embedding a photonic sensor in metal

A method of embedding a photonic sensor in metal, the method comprising:

• depositing a first optically insulating layer on a substrate;
• depositing and patterning a waveguide material on the first optically insulating layer to define the photonic sensor;
• depositing and patterning a second optically insulating layer over the photonic sensor;
• depositing a first metal layer over the second optically insulating layer;
• etching the substrate to free the first and second optically insulating layers, the photonic sensor, and the first metal layer from the substrate and thus expose a surface of the first optically insulating layer;
• depositing a second metal layer over the exposed surface of the first optically insulating layer and thus substantially embed the photonic sensor and first and second optically insulating layers between the first and second metal layers.

A method for sensing properties of a workpiece with a photonic device, the method comprising:

• providing an optical signal to the photonic device;
• coupling the photonic device to the workpiece for which a measurement is desired, the photonic device generating an output signal in response to the optical signal, wherein at least one of an intensity of the output signal and a wavelength of the output signal depends on at least one of thermal characteristics and mechanical characteristics of the workpiece;
• and
• receiving the output signal from the photonic device, and, based on the output signal, determining at least one of the thermal characteristics and the mechanical characteristics of the workpiece.

A system for sensing properties of at least two regions of a workpiece with at least two distributed photonic devices, the system comprising:

• an optical input that outputs an optical signal;
• at least two distributed photonic devices coupled to the least two regions of the workpiece and to the optical input, the at least two distributed photonic devices generating at least two output signals in response to the optical input, wherein at least one of an intensity and a wavelength of each of the at least two output signals depends on at least one of thermal characteristics and mechanical characteristics of the at least two regions of the workpiece;
• an optical detector receiving the at least two output signals from the at least two distributed photonic devices and configured to generate a corresponding electronic signal;
• and
• a digital processing device coupled to the detector that determines at least one of the thermal characteristics and the mechanical characteristics of the at least two regions of the workpiece based on the electronic signal.

A system for sensing at properties of a workpiece, the system comprising:

• means for outputting an optical signal;
• means, coupled to the workpiece and to the optical signal, for generating an output signal in response to the optical signal, wherein at least one of an intensity of the output signal and a wavelength of the output signal depends on at least one of thermal characteristics and mechanical characteristics of the workpiece;
• means for detecting the output signal;
• and
• means for determining at least one of the thermal characteristics and the mechanical characteristics of the workpiece based on the detected output signal.