Shape evaluation method, shape evaluation device, and 3d inspection device

2:

• The shape evaluation method according to claim 1, wherein only representing points for which a plane defined by the specified shape becomes parallel to a predefined direction vector are selected in the representing point select step.

3:

• The shape evaluation method according to claim 1, wherein the highlight line creation step comprises a step to collect highlight points contained in a predefined range with regard to given highlight points among the highlight point group and to determine a straight-line direction from the collected highlight points, and the highlight lines are created based on polygonal lines formed by connecting straight-line directions that are determined for each of the highlight lines.

4:

• The shape evaluation method according to claim 1, wherein a direction to be imaginarily defined as the visual recognition direction is changed and a direction for which an evaluation value used to evaluate the surface shape of an object to be evaluated becomes the maximum or the minimum is defined as the visual recognition direction.

5:

• The shape evaluation method according to claim 1, wherein the shape recognition step recognizes surface shape data of an object to be evaluated based on a measurement value obtained from a measurement result of the surface shape of the object to be evaluated.

6:

• The shape evaluation method according to claim 1, wherein the shape recognition step recognizes surface shape data of an object to be evaluated by reading imaginary shape data representing a shape of the object to be evaluated.

7:

• The shape evaluation method according to claim 6, wherein the representing point extraction step projects a plane containing a point group in which points are arranged at regular intervals on the shape data of an object to be evaluated that is imaginarily constructed and extracts the positions on the shape data at which the point group is projected as the representing points.

8:

• The shape evaluation method according to claim 6, wherein the shape data is corrected based on a result of the evaluation of the surface shape, and the evaluation is performed again.

10:

• The shape evaluation apparatus according to claim 9, comprising a measurement portion to measure surface shape data of the object to be evaluated, wherein the surface shape is recognized based on a measurement value obtained from a measurement result measured by the measurement portion.

11:

• The shape evaluation apparatus according to claim 9, further comprising a storage area to store surface shape data obtained when an object to be evaluated is imaginarily constructed, wherein the surface shape of the object to be evaluated is recognized based on the stored surface shape data.