Dual-purpose perturbation engine for automatically processing pattern-clip-based manufacturing hotspots

A computer-readable storage medium storing instructions that when executed by a computer cause the computer to perform a method for automatically processing manufacturing hotspot information, the method comprising:

• receiving a pattern clip associated with a manufacturing hotspot in a layout, wherein the pattern clip comprises a set of polygons in proximity to the manufacturing hotspot's location;
• determining if the pattern clip matches a known manufacturing hotspot configuration;
• if the pattern clip does not match a known manufacturing hotspot configuration, performing a perturbation process on the pattern clip to:
• determine a set of correction recommendations to eliminate the manufacturing hotspot;
• and
• determine ranges of perturbation to the set of polygons wherein the perturbed pattern clip does not eliminate the manufacturing hotspot;
• and
• storing the set of correction recommendations and the ranges of perturbation into a manufacturing hotspot database.

A system that generates a pattern-clip-based hotspot database for performing automatic pattern-clip-based layout verification, comprising:

• a receiving mechanism configured to receive a pattern clip associated with a manufacturing hotspot in a layout, wherein the pattern clip comprises a set of polygons in proximity to the manufacturing hotspot's location;
• a determination mechanism configured to determine if the pattern clip matches a known manufacturing hotspot configuration;
• a perturbation mechanism configured to perform a perturbation process on the pattern clip (if the pattern clip does not match a known manufacturing hotspot configuration) to:
• determine a set of correction recommendations to eliminate the manufacturing hotspot;
• and
• determine ranges of perturbation to the set of polygons wherein the perturbed pattern clip does not eliminate the manufacturing hotspot;
• and
• a storage mechanism configured to store the set of correction recommendations and the ranges of perturbation into a manufacturing hotspot database.