Exposure apparatus, movable body drive system, pattern formation apparatus, and exposure method, and device manufacturing method

An exposure apparatus that exposes an object with an exposure beam, the apparatus comprising:

• a movable body which holds the object and is movable within a predetermined plane including a first axis and a second axis orthogonal to each other;
• and
• a periphery edge exposure system which is arranged between an exposure position where the exposure is performed and an exchange position of the object placed away from the exposure position in a direction parallel to the first axis, and exposes at least a part of a periphery area which is different from an area on the object where the exposure is performed, wherein
• at least a part of an exposure operation of the periphery area is performed in parallel with a movement operation of the movable body from one of the exposure position and the exchange position to the other.

An exposure apparatus that exposes an object with an energy beam and forms a pattern on the object, the apparatus comprising:

• a first movable body which holds an object and moves within a predetermined plane which includes a first axis and a second axis orthogonal to each other;
• a second movable body which holds an object and moves independently from the first movable body within the plane;
• a mark detection system which has a plurality of detection areas whose positions are different in a direction parallel to the second axis, and detects a mark on the object mounted on each of the first and second movable bodies;
• and
• a controller which detects a plurality of different marks of an object held by the other one of the first and second movable bodies with the mark detection system and measures positional information of the marks, while moving the other one of the movable bodies in a direction parallel to the first axis, in parallel with an exposure performed of an object held by one of the first and second movable bodies.

An exposure apparatus that exposes an object with an energy beam and forms a pattern on the object, the apparatus comprising:

• a first movable body which holds an object and moves within a predetermined plane which includes a first axis and a second axis orthogonal to each other;
• a second movable body which holds an object and moves independently from the first movable body within the plane;
• a planar motor which drives the first and the second movable body within the plane;
• and
• a controller which controls the planar motor, and also moves the first movable body along a first return path located on one side of an exposure position where the exposure is performed in a direction parallel to the second axis to a first exchange position where an object on the first movable body is exchanged when exposure of an object held by the first movable body has been completed, as well as move the second movable body along a second return path located on the other side of an exposure position in a direction parallel to the second axis to a second exchange position where an object on the second movable body is exchanged when exposure of an object held by the second movable body has been completed.

An exposure apparatus that exposes an object with an energy beam and forms a pattern on the object, the apparatus comprising:

• a first movable body which holds an object and moves within a predetermined plane which includes a first axis and a second axis orthogonal to each other;
• a second movable body which holds an object and moves independently from the first movable body within the plane;
• a planar motor which drives the first and the second movable body within the plane;
• an optical member which emits the energy beam;
• a liquid immersion device which supplies liquid in a space between the optical member and one of the first and second movable bodies, and forms a liquid immersion area;
• and
• a controller which controls the planar motor so as to perform a switching between a proximity state in which the first movable body and the second movable body are made to be in proximity in a direction parallel to the first axis by a predetermined distance or less and a separation state in which both movable bodies are separated so as to pass the liquid immersion area from the one movable body to the other movable body, after exposure has been completed on an object held by the one movable body, and to move the one movable body separated from the other movable body along a return path positioned on one side of the exposure position in a direction parallel to the second axis to an exchange position where an object on the first and second movable bodies are exchanged.

An exposure apparatus that exposes an object with an energy beam, the apparatus comprising:

• a movable body which can hold the object and is also substantially movable along a predetermined plane;
• a measurement device which has a measurement position where a measurement beam is irradiated placed away from an exposure position where the energy beam is irradiated in a first direction within the predetermined plane, and measures positional information of the object;
• an encoder system in which a scale having a two-dimensional grating and whose longitudinal direction is in the first direction is placed on both sides of the movable body in a second direction orthogonal to the first direction within the predetermined plane, and a pair of head units having a plurality of heads whose positions in the second direction are different and at least one head faceable to each of the two scales is placed faceable to the movable body, and based on an output of two heads simultaneously facing the pair of scales, measures positional information of the movable body in directions of three degrees of freedom within the predetermined plane;
• and
• a drive device which drives the movable body based on positional information of the movable body measured by the measurement device and positional information of the movable body measured by the encoder system.

An exposure apparatus that exposes an object with an energy beam, the apparatus comprising:

• a movable body which can hold the object and is also substantially movable along a predetermined plane;
• a measurement device which has a measurement position where a measurement beam is irradiated placed away from an exposure position where the energy beam is irradiated in a first direction within the predetermined plane, and measures positional information of the object;
• an encoder system in which a pair of scales having a two-dimensional grating and whose longitudinal direction is in a second direction orthogonal to the first direction within the predetermined plane is placed faceable to the movable body, and a plurality of heads whose positions in the first direction are different and at least one head is faceable to each of the two scales are placed on both sides of the movable body, and based on an output of two heads simultaneously facing the pair of scales, measures positional information of the movable body in directions of three degrees of freedom within the predetermined plane;
• and
• a drive device which drives the movable body based on positional information of the movable body measured by the measurement device and positional information of the movable body measured by the encoder system.

An exposure method in which an object is exposed with an energy beam, the method comprising:

• holding an object with a movable body which is substantially movable along a predetermined plane;
• measuring positional information of the object on the movable body at a measurement position where a measurement beam is irradiated that is placed away from an exposure position where the energy beam is irradiated in a first direction within the predetermined plane;
• measuring positional information of the movable body in directions of three degrees of freedom within the predetermined plane with an encoder system in which a pair of scales having a two-dimensional grating and whose longitudinal direction is in the first direction is placed on the movable body separately in a second direction orthogonal to the first direction within the predetermined plane, and a pair of head units having a plurality of heads whose positions in the second direction are different and at least one head faceable to each of the pair of scales is placed faceable to the movable body;
• and
• driving the movable body based on positional information which has been measured and the measurement information of the encoder system and exposing the object with the energy beam.

An exposure method in which an object is exposed with an energy beam, the method comprising:

• holding an object with a movable body which is substantially movable along a predetermined plane;
• measuring positional information of the object on the movable body at a measurement position where a measurement beam is irradiated that is placed away from an exposure position where the energy beam is irradiated in a first direction within the predetermined plane;
• measuring positional information of the movable body in directions of three degrees of freedom within the predetermined plane, with an encoder system in which a pair of scales having a two-dimensional grating and whose longitudinal direction is in a second direction orthogonal to the first direction within the predetermined plane is placed faceable to the movable body, and a plurality of heads whose positions in the first direction are different and at least one head is faceable to the pair of scales are placed on both sides of the movable body;
• and
• driving the movable body based on positional information which has been measured and the measurement information of the encoder system and exposing the object with the energy beam.