Microwave Generating Apparatus and Microwave Generating Method

A microwave generating apparatus comprising:

• a switch signal generator that generates a square wave switch signal having a fundamental frequency of a microwave band;
• a switching power amplifier that performs a switching power amplification based on the switch signal so as to output an amplified signal;
• a variable voltage supplier that is capable of variably supplying a driving voltage for amplification to the switching power amplifier;
• a microwave selector that extracts from the amplified signal a sine wave signal of the same frequency as the fundamental frequency of the switch signal so as to output the same as a microwave;
• a light detector that detects a light emitted from a plasma generated by the microwave;
• and
• a driving voltage controller that controls the variable voltage supplier based on a result detected by the light detector.

A microwave generating apparatus comprising:

• a switch signal generator that generates a square wave switch signal having a fundamental frequency of a microwave band;
• a switching power amplifier that performs a switching power amplification based on the switch signal so as to output an amplified signal;
• a variable voltage supplier that is capable of variably supplying a driving voltage for amplification to the switching power amplifier;
• a light detector that detects a light emitted from a plasma generated by the amplified signal;
• and
• a driving voltage controller that controls the variable voltage supplier based on a result detected by the light detector.