Micro rocking device and method for manufacturing the same

A micro rocking device comprising:

• a frame;
• a rocking portion including a first comb-like electrode;
• a torsion connecting portion connecting the frame and the rocking portion and defining the axis of rotational displacement of the rocking portion;
• and
• a second comb-like electrode attracting the first comb-like electrode and rotationally displacing the rocking portion,
• wherein the first comb-like electrode has a plurality of first parallel electrode teeth extending in the direction of the axis and are spaced from each other in a direction crossing the extension direction;
• the second comb-like electrode has a plurality of second parallel electrode teeth extending in the direction of the axis and are spaced from each other in a direction crossing the extension direction;
• each of the second electrode teeth has a first side surface on the axis side and a second side surface opposite to the first side surface;
• and
• the second side surface has a taper region on the side opposite to the first electrode teeth, the taper region being inclined closer to the axis in a direction away from the first electrode teeth.