Back to results
US 2009/0267267 A1Published application
Imprint method
AssigneeKabushiki Kaisha Toshiba
InventorsIkuo Yoneda, Tetsuro Nakasugi, Shinji Mikami
Life of this patent
Estimating the term…
Abstract
An imprint method includes contacting a template on a substrate, the template including a pattern to be transferred on the substrate, separating the template from the substrate, and removing particle adhered on the template before contacting the template on the substrate, the removing the particle including pressing the template on an adhesive member and separating the pressed template from the adhesive member, wherein adhesiveness of the adhesive member to the template is higher than adhesiveness of the adhesive member to the substrate.
Claims15
An imprint method comprising:
- contacting a template on a substrate, the template including a pattern to be transferred on the substrate;
- separating the template from the substrate;
- and
- removing particle adhered on the template before contacting the template on the substrate, the removing the particle including pressing the template on an adhesive member and separating the pressed template from the adhesive member, wherein adhesiveness of the adhesive member to the template is higher than adhesiveness of the adhesive member to the substrate.
1 more element
Dependencies are inferred from the claim text.