Photo-patterned carbon electronics
AssigneeBAE Systems Information and Electronic Systems Integration Inc.
InventorsDaniel N. CAROTHERS, Rick Thompson
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Abstract
A system is provided for the manufacture of carbon based electrical components including, an ultraviolet light source; a substrate receiving unit whereby a substrate bearing a first layer of carbon based semiconductor is received and disposed beneath the ultraviolet light source; a mask disposed between the ultraviolet light source and the carbon based semiconductor layer; a doping agent precursor source; and environmental chemical controls, configured such that light from the ultraviolet light source irradiates a doping agent precursor and the first carbon layer.
Claims8
A method for the production of carbon based electrical components, said method comprising:
- Providing a wafer substrate;
- Depositing upon said wafer substrate a first layer of carbon based semiconductor;
- Introducing said first layer of carbon based semiconductor to a first doping agent precursor;
- Irradiating said first doping agent precursor and said first layer of carbon based semiconductor with light having a wavelength in the ultraviolet spectrum thereby selectively doping areas of said first layer of carbon based semiconductor.
A carbon based electrical component, said carbon based electrical component comprising:
- A three dimensional carbon based electrical circuit comprising a plurality of layers of carbon material;
- At least one section of each layer in said plurality of layers being doped in at least one layer doping pattern;
- Said at least one layer doping pattern of each said layer being aligned to said at least one layer doping pattern in an adjacent layer of said plurality of layers so as to produce a desired vertical circuit.
Dependencies are inferred from the claim text.