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US 2009/0266807 A1Published application
Oven control system
AssigneeUnited Test and Assembly Test Center Ltd.
InventorVenkatachalam VALLIAPPAN
Life of this patent
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Abstract
An oven control system and methods of operating the same are disclosed. The oven control system provides various automated tracking and control functions to reduce errors and defects in oven cure operations.
Claims18
An oven curing system comprising:
- an oven having an oven chamber;
- at least a temperature sensor disposed in the oven chamber;
- and
- a computing device coupled to the temperature sensor to receive a plurality of temperature readings therefrom to ascertain an actual temperature profile of the oven during processing of at least a first lot of semiconductor work piece using a first oven recipe, and to ascertain a deviation of the actual temperature profile from a predetermined temperature profile associated with the first oven recipe.
1 more element
A method for processing a semiconductor work piece, the method comprising:
- ascertaining a first oven recipe required by a first lot of semiconductor work piece;
- retrieving a predetermined temperature profile corresponding to the first oven recipe;
- while processing the first lot with the first oven recipe, ascertaining an actual temperature profile of the oven;
- and
- ascertaining a deviation of the actual temperature profile from the predetermined temperature profile.
2 more elements
Dependencies are inferred from the claim text.