US 2009/0265673 A1 · INTERSECT AREA BASED GROUND RULE FOR SEMICONDUCTOR DESIGN

Abstract

A design rule that determines a degree of overlap between two design elements in two adjoining levels by estimating a physical overlap area, or an “intersect area,” of corresponding structures in a semiconductor chip is provided. The estimation of the physical intersect area may factor in line edge biasing, critical dimension tolerance, overlay tolerance, and corner rounding to provide an accurate estimate of a physical area for each of the structures corresponding to the two design elements. The intersect area is employed as a metric to determine compliance with a ground rule, i.e., the ground rule is specified in terms of the intersect region. Other derived quantities such as electrical resistance, electromigration resistance, expected yield may be calculated from the intersect area, and may be advantageously employed to optimize the design data.

Claims25

Dependent claims

A method for designing a semiconductor chip comprising:

determining an intersect area between a first projected physical area of a first design shape and a second projected physical area of a second design shape;
determining whether said intersect area is equal to or exceeds a predetermined value;
modifying at least one of said first and second design shapes if said intersect area is less than said predetermined value, until said intersect area is equal to or exceeds said predetermined value;
creating a design data comprising at least said first and second design shapes;
and
designing said semiconductor chip based upon said design data.

3 more elements

A method for designing a semiconductor chip comprising:

determining an intersect area between a first projected physical area of a first design shape and a second projected physical area of a second design shape;
determining whether said intersect area is equal to or exceeds a predetermined value;
determining whether a value for a physical quantity derived from said intersect area is within a predefined specification for said physical quantity;
modifying at least one of said first and second design shapes if said intersect area is less than said predetermined value or if said value is outside said predefined specification, until said intersect area is equal to or exceeds said predetermined value and said physical quantity is within said predefined specification;
creating a design data comprising at least said first and second design shapes;
and
designing said semiconductor chip based upon said design data.

4 more elements

Dependencies are inferred from the claim text.

Intersect area based ground rule for semiconductor design

Life of this patent

Intersect area based ground rule for semiconductor design

Life of this patent

Abstract

Claims25