Cylindrical Magnetron
AssigneeAngstrom Sciences, Inc.
InventorMark A. Bernick
Life of this patent
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Abstract
A rotatable cylindrical magnetron sputtering device that includes a cathode body defining a magnet receiving chamber and a cylindrical target assembly surrounding the cathode body, wherein the cylindrical target assembly is rotatable around the cathode body. The cylindrical target assembly includes a hollow mandrel and a target portion mounted around and spaced away from the hollow mandrel portion so as to create a space gap between the hollow mandrel and the target portion, wherein the space gap may be greater than 0.002 inch and less than 0.020 inch.
Claims23
A cylindrical target assembly for use in a rotatable cylindrical magnetron sputtering device, the assembly comprising:
- a hollow mandrel;
- and
- a target portion mounted around and spaced away from the hollow mandrel wherein a space gap is defined between the hollow mandrel and the target portion.
A rotatable cylindrical magnetron sputtering device comprising:
- a cathode body defining a magnet receiving chamber, wherein a magnet arrangement is received with the magnet receiving chamber;
- a cylindrical target assembly surrounding the cathode body, the cylindrical target assembly comprises a hollow mandrel and a target portion mounted around and spaced away from the hollow mandrel wherein a space gap is defined between the hollow mandrel and the target portion;
- and
- a drive assembly in communication with the cylindrical target assembly, wherein the cylindrical target assembly is rotatable around the cathode body.
A process for enhancing the operation of a cylindrical target assembly, the steps comprising:
- providing the cylindrical target assembly for rotation around a cathode body, wherein the cylindrical target assembly comprises a hollow mandrel and a target portion;
- mounting the target portion around a portion of the hollow mandrel, wherein the target portion is spaced away from the hollow mandrel so as to create a space gap between the hollow mandrel and the target portion;
- and
- securing the target portion of the cylindrical target assembly onto the hollow mandrel such that the target portion rotates with the hollow mandrel.
Dependencies are inferred from the claim text.